Improving bulk FinFET DC performance in comparison to SOI FinFET

Mirko Poljak; Vladimir Jovanović; Tomislav Suligoj

doi:10.1016/j.mee.2009.01.066

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Improving bulk FinFET DC performance in comparison to SOI FinFET

Mirko Poljak Vladimir Jovanović Tomislav Suligoj

Year: 2009 Journal: Microelectronic Engineering Vol: 86 (10)Pages: 2078-2085 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2009.01.066

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Keywords:

Silicon on insulator Materials science Doping Wafer Optoelectronics Subthreshold conduction Silicon MOSFET Scaling Short-channel effect CMOS Electronic engineering Electrical engineering Transistor Voltage Engineering

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Advancements in Semiconductor Devices and Circuit Design

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Carbide Semiconductor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Improving bulk FinFET DC performance in comparison to SOI FinFET

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