JOURNAL ARTICLE
Phase-shifting interferometry: measurements with high-reflectance surfaces
Year: 2002 Journal: Optical Engineering Vol: 41 (4)Pages: 856-856 Publisher: SPIE
Abstract
With a phase-shifting Fizeau interferometer, problems arise in making accurate measurements of nominally flat optical surfaces with high-reflectance coatings. We describe a simple technique that can be used to make accurate measurements of such surfaces.
Keywords:
Interferometry Reflectivity Optics Remote sensing Optical engineering Phase (matter) Computer science Materials science Geology Physics
Metrics
3
Cited By
0.68
FWCI (Field Weighted Citation Impact)
15
Refs
0.68
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Optical measurement and interference techniques
Physical Sciences → Computer Science → Computer Vision and Pattern Recognition
Advanced Measurement and Metrology Techniques
Physical Sciences → Engineering → Mechanical Engineering
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
Related Documents
JOURNAL ARTICLE
High accuracy measurements of objects with multiple reflective surfaces with wavelength shifting interferometry
Shouhong TangRichard E. BillsKlaus Freischlad
Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Year: 2007 Vol: 6723 Pages: 67230F-67230F
JOURNAL ARTICLE
Thermal conductivity measurements using phase-shifting interferometry
Ivan KuznetsovI. B. MukhinD. E. SilinOleg Palashov
Journal: Optical Materials Express Year: 2014 Vol: 4 (10)Pages: 2204-2204
JOURNAL ARTICLE
Local reflectance spectra measurements of surfaces using coherence scanning interferometry
Rémy ClaveauPaul MontgomeryManuel FluryD. Montaner
Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Year: 2016 Vol: 9890 Pages: 98900Q-98900Q
BOOK-CHAPTER
Phase-Shifting Interferometry
Daniel MalacaraManuel Servı́nZacarías Malacara
Year: 2018 Pages: 359-398