Ion-beam-assisted sputter deposition of thin oxide films

A. M. Ektessabi

doi:10.1016/0257-8972(94)90162-7

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Ion-beam-assisted sputter deposition of thin oxide films

A. M. Ektessabi

Year: 1994 Journal: Surface and Coatings Technology Vol: 68-69 Pages: 208-216 Publisher: Elsevier BV

DOI: 10.1016/0257-8972(94)90162-7

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Keywords:

Materials science Sputtering Thin film Ion beam mixing Ion beam Irradiation Deposition (geology) Argon Ion beam-assisted deposition Sputter deposition Stoichiometry Analytical Chemistry (journal) Ion beam deposition Oxide Ion Nanotechnology Metallurgy Atomic physics Chemistry

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Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion-beam-assisted sputter deposition of thin oxide films

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