JOURNAL ARTICLE
Characterization of rf-sputtered HfMgZnO thin films
Hung-Kai ChungJian‐Zhang ChenI‐Chun Cheng
Year: 2012 Journal: MRS Proceedings Vol: 1432 Publisher: Cambridge University Press
Keywords:
Materials science Amorphous solid Analytical Chemistry (journal) Full width at half maximum Band gap Annealing (glass) Sputtering Thin film Grain size Hafnium Crystallography Zirconium Metallurgy Nanotechnology Optoelectronics
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1
Cited By
0.15
FWCI (Field Weighted Citation Impact)
21
Refs
0.45
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Citation History
Topics
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences → Materials Science → Polymers and Plastics
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