The epitaxial growth of evaporated Cu/CaF2 bilayers on Si(111)

Abstract

Successful and unexpected epitaxial growth of Cu/CaF2 bilayers on hydrogen terminated Si(111) wafers by thermal evaporation is reported. The bilayers were characterized with conventional x-ray diffraction experiments, grazing angle incidence x-ray diffraction experiments, rocking curves, and χ scans. The growth mode of Cu films on CaF2 epitaxially grown on Si(111) is completely different from that of the Cu film grown directly on Si(111).