JOURNAL ARTICLE
TEM studies of RF magnetron-sputtered thin films
Ian M. ReaneyD. J. BarberR. Watton
Year: 1992 Journal: Journal of Materials Science Materials in Electronics Vol: 3 (1)Pages: 51-63 Publisher: Springer Science+Business Media
Keywords:
Sapphire Materials science Thin film Dielectric Microstructure Ferroelectricity Substrate (aquarium) Layer (electronics) Transmission electron microscopy Sputter deposition Sputtering Analytical Chemistry (journal) Composite material Optoelectronics Optics Nanotechnology Chemistry
Metrics
7
Cited By
0.99
FWCI (Field Weighted Citation Impact)
15
Refs
0.73
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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