Annealing studies of magnetron-sputtered CoCr thin films

B.G. Demczyk; J. O. Artman

doi:10.1016/0921-4526(93)90125-p

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Annealing studies of magnetron-sputtered CoCr thin films

B.G. Demczyk J. O. Artman

Year: 1993 Journal: Physica B Condensed Matter Vol: 183 (4)Pages: 351-362 Publisher: Elsevier BV

DOI: 10.1016/0921-4526(93)90125-p

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Keywords:

Materials science Annealing (glass) Microstructure Coercivity Thin film Electrical resistivity and conductivity Composite material Grain boundary Grain size Sputter deposition Cavity magnetron Anisotropy Condensed matter physics Sputtering Optics Nanotechnology Electrical engineering

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Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Magnetic properties of thin films

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Magnetic Properties and Applications

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Annealing studies of magnetron-sputtered CoCr thin films

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