JOURNAL ARTICLE

Annealing studies of magnetron-sputtered CoCr thin films

B.G. DemczykJ. O. Artman

Year: 1993 Journal:   Physica B Condensed Matter Vol: 183 (4)Pages: 351-362   Publisher: Elsevier BV
Keywords:
Materials science Annealing (glass) Microstructure Coercivity Thin film Electrical resistivity and conductivity Composite material Grain boundary Grain size Sputter deposition Cavity magnetron Anisotropy Condensed matter physics Sputtering Optics Nanotechnology Electrical engineering

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Topics

Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Magnetic properties of thin films
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Magnetic Properties and Applications
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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