A comparative study of magnetron co-sputtered nanocrystalline titanium aluminium and chromium aluminium nitride coatings

Richard Wuhrer; Wing Yiu Yeung

doi:10.1016/j.scriptamat.2004.03.007

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A comparative study of magnetron co-sputtered nanocrystalline titanium aluminium and chromium aluminium nitride coatings

Richard Wuhrer Wing Yiu Yeung

Year: 2004 Journal: Scripta Materialia Vol: 50 (12)Pages: 1461-1466 Publisher: Elsevier BV

DOI: 10.1016/j.scriptamat.2004.03.007

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Keywords:

Materials science Chromium nitride Aluminium Nanocrystalline material Metallurgy Cavity magnetron Aluminium nitride Chromium Titanium Nitride Sputter deposition Titanium nitride Thin film Composite material Sputtering Nanotechnology Layer (electronics)

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

A comparative study of magnetron co-sputtered nanocrystalline titanium aluminium and chromium aluminium nitride coatings

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