Investigation of the Silicon Nitride on Hydrogenated Amorphous Silicon Interface

A. V. Gelatos; Jerzy Kanicki

doi:10.1557/proc-149-729

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Investigation of the Silicon Nitride on Hydrogenated Amorphous Silicon Interface

A. V. Gelatos Jerzy Kanicki

Year: 1989 Journal: MRS Proceedings Vol: 149 Publisher: Cambridge University Press

DOI: 10.1557/proc-149-729

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Keywords:

Materials science Nanocrystalline silicon Amorphous silicon Silicon Silicon nitride Optoelectronics Nitride Amorphous solid Capacitance Layer (electronics) Nanotechnology Crystalline silicon Crystallography Electrode Chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Investigation of the Silicon Nitride on Hydrogenated Amorphous Silicon Interface

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