Dynamic Scheduling for Semiconductor Wafer Fabrication Based on ETAEMS and MAS

Abstract

The dynamic scheduling problem of semiconductor wafer fabrication is a highly complicated discrete event system. Based on multi-agent system and ETAEMS method, this paper develops an efficient dynamic scheduling system called by MEBDSS. Intelligent computing algorithms are also applied in the method. Computational experiment results show that the proposed method is effective and better than existing methods.