High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process

JOURNAL ARTICLE

Year: 2005 Journal: Microsystem Technologies Vol: 12 (3)Pages: 187-192 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-005-0050-6

Keywords:

Electroforming LIGA Fabrication Materials science Process (computing) Metallurgy Nanotechnology Computer science

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0.29

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0.59

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