JOURNAL ARTICLE

High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process

Hsiharng YangReiyu CheinTung‐Chou TsaiJ. C. ChangJyh-Shyang Wu

Year: 2005 Journal:   Microsystem Technologies Vol: 12 (3)Pages: 187-192   Publisher: Springer Science+Business Media
Keywords:
Electroforming LIGA Fabrication Materials science Process (computing) Metallurgy Nanotechnology Computer science

Metrics

16
Cited By
0.29
FWCI (Field Weighted Citation Impact)
15
Refs
0.59
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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