Transparent conducting Nb-doped anatase TiO2 (TNO) thin films sputtered from various oxide targets

Naoomi Yamada; Taro Hitosugi; Junpei Kasai; Ngoc Lam Huong Hoang; Shoichiro Nakao; Yasushi Hirose; Toshihiro Shimada; Tetsuya Hasegawa

doi:10.1016/j.tsf.2009.07.205

JOURNAL ARTICLE

Transparent conducting Nb-doped anatase TiO2 (TNO) thin films sputtered from various oxide targets

Naoomi Yamada Taro Hitosugi Junpei Kasai Ngoc Lam Huong Hoang Shoichiro Nakao Yasushi Hirose Toshihiro Shimada Tetsuya Hasegawa

Year: 2009 Journal: Thin Solid Films Vol: 518 (11)Pages: 3101-3104 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2009.07.205

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Keywords:

Anatase Electrical resistivity and conductivity Materials science Annealing (glass) Doping Oxide Thin film Sputtering Transparent conducting film Electrical conductor Oxygen Optoelectronics Nanotechnology Chemical engineering Composite material Chemistry Metallurgy Electrical engineering Photocatalysis

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transparent conducting Nb-doped anatase TiO2 (TNO) thin films sputtered from various oxide targets

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