JOURNAL ARTICLE
Ultra-Thin Sputtered Pzt Films for Ulsi Drams
Jiyoung KimC. SudhamaR. KhamankarJ. Jack Lee
Year: 1993 Journal: MRS Proceedings Vol: 310 Publisher: Cambridge University Press
Keywords:
Materials science Dram Thin film Capacitor Optoelectronics Deposition (geology) Leakage (economics) Grain size Composite material Voltage Nanotechnology Electrical engineering
Metrics
1
Cited By
0.33
FWCI (Field Weighted Citation Impact)
8
Refs
0.54
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Battery Materials and Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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