JOURNAL ARTICLE

Ultra-Thin Sputtered Pzt Films for Ulsi Drams

Jiyoung KimC. SudhamaR. KhamankarJ. Jack Lee

Year: 1993 Journal:   MRS Proceedings Vol: 310   Publisher: Cambridge University Press
Keywords:
Materials science Dram Thin film Capacitor Optoelectronics Deposition (geology) Leakage (economics) Grain size Composite material Voltage Nanotechnology Electrical engineering

Metrics

1
Cited By
0.33
FWCI (Field Weighted Citation Impact)
8
Refs
0.54
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Battery Materials and Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

JOURNAL ARTICLE

Loss mechanisms in fine-grained ferroelectric ceramic thin films for ULSI memories (DRAMs)

J. F. ScottCarlos A. Paz de AraújoB. M. Melnick

Journal:   Journal of Alloys and Compounds Year: 1994 Vol: 211-212 Pages: 451-454
JOURNAL ARTICLE

Electrode-dielectric interface in thin-film DRAMs for ULSI

J. F. Scott

Journal:   Integrated ferroelectrics Year: 1994 Vol: 5 (2)Pages: 103-106
JOURNAL ARTICLE

Stress Evolution in Ultra Thin Sputtered Films

Quanmin SuR. C. CammarataManfred Wuttig

Journal:   MRS Proceedings Year: 1995 Vol: 405
JOURNAL ARTICLE

Dielectric breakdown in high-ε films for ULSI DRAMs

J. F. ScottB. M. MelnickL. D. McMillanCarlos A. Paz de Araújo

Journal:   Integrated ferroelectrics Year: 1993 Vol: 3 (3)Pages: 225-243
JOURNAL ARTICLE

Dielectric breakdown in high-ε films for ulsi drams

J. F. ScottB. M. MelnickL. D. McMillanCarlos A. Paz de AraújoM. Azuma

Journal:   Ferroelectrics Year: 1993 Vol: 150 (1)Pages: 209-218
© 2026 ScienceGate Book Chapters — All rights reserved.