JOURNAL ARTICLE

Preparation and characterization of (Ba1−xSrx)(Ti0.9Sn0.1)O3 thin films deposited on Pt/Ti/SiO2/Si substrate by RF magnetron sputtering

Moo-Chin WangCheng-Chi TsaiKun-Ming HungNan‐Chung Wu

Year: 2002 Journal:   Journal of Crystal Growth Vol: 241 (4)Pages: 439-447   Publisher: Elsevier BV
Keywords:
Thin film Materials science Scanning electron microscope Sputter deposition Analytical Chemistry (journal) Substrate (aquarium) Sputtering Transmission electron microscopy Electron diffraction Cavity magnetron Diffraction Chemistry Optics Composite material Nanotechnology

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Topics

Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering

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