JOURNAL ARTICLE

Silicon pressure sensor with integrated bias stabilization and temperature compensation

H. CrazzolaraWaldemar von MünchM. Nägele

Year: 1992 Journal:   Sensors and Actuators A Physical Vol: 30 (3)Pages: 241-247   Publisher: Elsevier BV
Keywords:
Materials science Fabrication Compensation (psychology) Piezoresistive effect Pressure sensor Substrate (aquarium) Optoelectronics Biasing Electronic circuit Voltage Silicon Integrated circuit Electrical engineering Electronic engineering Engineering Mechanical engineering

Metrics

9
Cited By
1.79
FWCI (Field Weighted Citation Impact)
11
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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