Silicon pressure sensor with integrated bias stabilization and temperature compensation

H. Crazzolara; Waldemar von Münch; M. Nägele

doi:10.1016/0924-4247(92)80127-o

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Silicon pressure sensor with integrated bias stabilization and temperature compensation

H. Crazzolara Waldemar von Münch M. Nägele

Year: 1992 Journal: Sensors and Actuators A Physical Vol: 30 (3)Pages: 241-247 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(92)80127-o

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Keywords:

Materials science Fabrication Compensation (psychology) Piezoresistive effect Pressure sensor Substrate (aquarium) Optoelectronics Biasing Electronic circuit Voltage Silicon Integrated circuit Electrical engineering Electronic engineering Engineering Mechanical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Silicon pressure sensor with integrated bias stabilization and temperature compensation

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