Structural investigation of Si-rich amorphous silicon oxynitride films

Wanderlã L. Scopel; Márcia Carvalho de Abreu Fantini; M.I. Alayo; I. Pereyra

doi:10.1016/s0040-6090(02)01053-2

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Structural investigation of Si-rich amorphous silicon oxynitride films

Wanderlã L. Scopel Márcia Carvalho de Abreu Fantini M.I. Alayo I. Pereyra

Year: 2003 Journal: Thin Solid Films Vol: 425 (1-2)Pages: 275-281 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(02)01053-2

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Keywords:

Silicon oxynitride Amorphous solid Silicon Materials science Amorphous silicon Chemical engineering Nanotechnology Mineralogy Chemistry Crystallography Optoelectronics Crystalline silicon Silicon nitride Engineering

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Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Structural investigation of Si-rich amorphous silicon oxynitride films

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