Aluminium- and indium-doped zinc oxide thin films prepared by DC magnetron reactive sputtering

G. Harding; B. Window; E.C. Horrigan

doi:10.1016/0165-1633(91)90007-8

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Aluminium- and indium-doped zinc oxide thin films prepared by DC magnetron reactive sputtering

G. Harding B. Window E.C. Horrigan

Year: 1991 Journal: Solar Energy Materials Vol: 22 (1)Pages: 69-91 Publisher: Elsevier BV

DOI: 10.1016/0165-1633(91)90007-8

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Keywords:

Materials science Indium Zinc Sputter deposition Sputtering Thin film Substrate (aquarium) Aluminium Doping Electrical resistivity and conductivity Dopant Cavity magnetron Analytical Chemistry (journal) Metallurgy Optoelectronics Nanotechnology Chemistry Electrical engineering

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Aluminium- and indium-doped zinc oxide thin films prepared by DC magnetron reactive sputtering

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