Four-terminal-gauge quasi-circular and square diaphragm silicon pressure sensors

Yozo Kanda; K. Yamamura

doi:10.1016/0250-6874(89)87032-5

ScienceGate Book Chapters

JOURNAL ARTICLE

Four-terminal-gauge quasi-circular and square diaphragm silicon pressure sensors

Yozo Kanda K. Yamamura

Year: 1989 Journal: Sensors and Actuators Vol: 18 (3-4)Pages: 247-257 Publisher: Elsevier BV

DOI: 10.1016/0250-6874(89)87032-5

Get Full-Text PDF Get Analytical Report

Keywords:

Square (algebra) Diaphragm (acoustics) Gauge (firearms) Terminal (telecommunication) Silicon Electrical engineering Engineering Physics Materials science Telecommunications Geometry Mathematics Optoelectronics Metallurgy

Metrics

Cited By

0.85

FWCI (Field Weighted Citation Impact)

Refs

0.73

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Four-terminal-gauge quasi-circular and square diaphragm silicon pressure sensors

Metrics

Citation History

Topics

Related Documents

Design Considerations for Silicon Circular Diaphragm Pressure Sensors

Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing

Low-pressure measurement limits for silicon piezoresistive circular diaphragm sensors

Geometric design rules of four-terminal gauge for pressure sensors

Static response of miniature capacitive pressure sensors with square or rectangular silicon diaphragm