Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Y. Li; C. Vančura; Diego Barrettino; M. Gräf; Christoph Hagleitner; A. Kummer; Martin Zimmermann; K.‐U. Kirstein; Andreas Hierlemann

doi:10.1016/j.snb.2007.03.035

JOURNAL ARTICLE

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Y. Li C. Vančura Diego Barrettino M. Gräf Christoph Hagleitner A. Kummer Martin Zimmermann K.‐U. Kirstein Andreas Hierlemann

Year: 2007 Journal: Sensors and Actuators B Chemical Vol: 126 (2)Pages: 431-440 Publisher: Elsevier BV

DOI: 10.1016/j.snb.2007.03.035

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Keywords:

Microsystem Transducer Materials science Capacitive sensing CMOS Surface micromachining Chip Optoelectronics SIGNAL (programming language) Electronics Nanotechnology Electrical engineering Computer science Engineering Fabrication

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Advanced Chemical Sensor Technologies

Physical Sciences → Engineering → Biomedical Engineering

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

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