Monolithic CMOS multi-transducer gas sensor microsystem

Abstract

This paper presents a monolithically integrated multi-transducer microsystem to detect organic and inorganic gases. The system comprises two polymer-based sensor arrays, a metal-oxide-based sensor array, driving and signal processing electronics and a digital communication interface. The chip is fabricated in industrial 0.8 /spl mu/m CMOS-technology with subsequent post-CMOS micromachining and operates at a supply voltage of 5 volt. The monolithic integration of different transducer types with associated driving and read-out circuitry significantly improves the discrimination capability of the system and reduces the packaging efforts.