Fabrication and microstructure of the d.c.-magnetron-sputtered YBa2Cu3O7 ? x superconducting thin films

Horng‐Show Koo; Tseung‐Yuen Tseng; Wen-Ruey Chang; GeorageC. Tu

doi:10.1007/bf00225627

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Fabrication and microstructure of the d.c.-magnetron-sputtered YBa2Cu3O7 ? x superconducting thin films

Horng‐Show Koo Tseung‐Yuen Tseng Wen-Ruey Chang GeorageC. Tu

Year: 1996 Journal: Journal of Materials Science Materials in Electronics Vol: 7 (2) Publisher: Springer Science+Business Media

DOI: 10.1007/bf00225627

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Keywords:

Microstructure Thin film Materials science Sputter deposition Substrate (aquarium) Superconductivity Cavity magnetron Fabrication Scanning electron microscope Diffraction Analytical Chemistry (journal) Phase (matter) Sputtering Deposition (geology) Mineralogy Crystallography Optics Composite material Condensed matter physics Nanotechnology Chemistry Physics

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Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Fabrication and microstructure of the d.c.-magnetron-sputtered YBa2Cu3O7 ? x superconducting thin films

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