Multichannel chromatic interferometry: metrology applications

Abstract

The modulation of the spectrum of a light beam is consider as a metrological tool. In particular, double spectral modulation of a Super Luminiscent Laser Diode (SLD) is used to analyze surface's profiles. Intensity and frequency modulation allows absolute measurements of the surface without any auxiliary phase shifting. Depth and lateral resolution is determined by the spectral resolution of the involved spectroscopic devices.