69.4: Invited Paper : SELAX Technology for Poly‐Si TFTs Integrated with Amorphous‐Si TFTs

Abstract

Abstract We developed an advanced LTPS (A‐LTPS) manufacturing process, which enables production of LTPS‐TFTs by utilizing the conventional a‐Si TFT production line. The a‐Si TFT process was combined with selectively enlarging laser crystallization (SELAX) technology to improve the carrier mobility in the region where the peripheral circuits are to be fabricated. A 2.4‐inch IPS‐LCD panel for personal digital assistant use was successfully fabricated using the developed technology.