JOURNAL ARTICLE

High-quality 6inch (111) 3C-SiC films grown on off-axis (111) Si substrates

Keywords:
Materials science Misorientation Profilometer Substrate (aquarium) Chemical vapor deposition Optoelectronics Thin film Surface finish Composite material Optics Nanotechnology Microstructure Grain boundary

Metrics

66
Cited By
6.11
FWCI (Field Weighted Citation Impact)
14
Refs
0.97
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Silicon Carbide Semiconductor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.