High-quality 6inch (111) 3C-SiC films grown on off-axis (111) Si substrates

Severino Alves; Corrado Bongiorno; Nicolò Piluso; M. Italia; Massimo Camarda; Marco Mauceri; Guglielmo G. Condorelli; Maria Ausilia di Stefano; Brunella Cafra; Antonino La Magna; Francesco La Via

doi:10.1016/j.tsf.2009.10.080

JOURNAL ARTICLE

High-quality 6inch (111) 3C-SiC films grown on off-axis (111) Si substrates

Severino Alves Corrado Bongiorno Nicolò Piluso M. Italia Massimo Camarda Marco Mauceri Guglielmo G. Condorelli Maria Ausilia di Stefano Brunella Cafra Antonino La Magna Francesco La Via

Year: 2009 Journal: Thin Solid Films Vol: 518 (6)Pages: S165-S169 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2009.10.080

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Keywords:

Materials science Misorientation Profilometer Substrate (aquarium) Chemical vapor deposition Optoelectronics Thin film Surface finish Composite material Optics Nanotechnology Microstructure Grain boundary

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Silicon Carbide Semiconductor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper Interconnects and Reliability

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Semiconductor materials and devices

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High-quality 6inch (111) 3C-SiC films grown on off-axis (111) Si substrates

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