Characteristics of a Smiling Polysilicon Thin-Film Transistor

Abstract

One-transistor dynamic random access memory (1T-DRAM) thin-film transistor (TFT) could lead the revolution of system-on-panel application. However, no useful 1T-DRAM is fabricated on the polysilicon (poly-Si) thin film up to now. In this letter, we present a novel method to fabricate a smiling poly-Si TFT for 1T-DRAM applications. The experimental results show that the short-channel effects can be reduced because the smiling scheme is used to suppress the charge sharing and the source/drain-tied scheme can help to overcome the self-heating. Moreover, the device fabrication is fully compatible with current complementary metal-oxide-semiconductor (CMOS) technology.