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JOURNAL ARTICLE

Electron-beam assisted physical vapor deposition of polycrystalline silicon films

Sara Thualfuqar Jamil Sanjeev Kumar Gupta K. Anbalagan Javeed Akhtar

Year: 2011 Journal: Materials Science in Semiconductor Processing Vol: 14 (3-4)Pages: 287-293 Publisher: Elsevier BV

DOI: 10.1016/j.mssp.2011.05.011

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Keywords:

Materials science Polycrystalline silicon Crystallite Electron beam physical vapor deposition Silicon Thin film Grain size Optoelectronics Chemical vapor deposition Doping Nanocrystalline silicon Composite material Nanotechnology Crystalline silicon Metallurgy Thin-film transistor Layer (electronics) Amorphous silicon

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Topics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

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