Carbon Incorporation on (1101) Facet of AlGaN in Metal Organic Vapor Phase Epitaxy

Abstract

Using C 2 H 2 as the source material, the incorporation of carbon into a (1101)AlGaN facet was studied in metal organic vapor phase epitaxy. The cathodo luminescence (CL) spectra for the sample surface were dominated by two near-band-edge emission peaks, assigned as a donor bound exciton (DBE) peak and a carbon-related exciton peak. The emission intensity of the carbon related exciton peak was enhanced by carbon doping, and the enhancement was more efficient on the (1101) facets than on the (0001) facet. It was found that more carbon is incorporated in a sample with high Al composition on the (1101) facets. In the case of Mg doping, on the other hand, the optical properties on the (1101) facets are nearly the same as those of the (0001) facet.