JOURNAL ARTICLE
Nanoscale Investigation of Grain Growth in RF-Sputtered Indium Tin Oxide Thin Films by Scanning Probe Microscopy
Buddhi Sagar LamsalMukul DubeyViswanathan SwaminathanYung HuhDavid GalipeauQiquan QiaoQi Hua Fan
Year: 2014 Journal: Journal of Electronic Materials Vol: 43 (11)Pages: 3965-3972 Publisher: Springer Science+Business Media
Keywords:
Kelvin probe force microscope Materials science Grain boundary Indium tin oxide Argon Thin film Amorphous solid Sputter deposition Volta potential Grain size Analytical Chemistry (journal) Sputtering Work function Metallurgy Nanotechnology Microstructure Chemistry Crystallography Layer (electronics)
Metrics
14
Cited By
0.97
FWCI (Field Weighted Citation Impact)
27
Refs
0.73
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Electronic and Structural Properties of Oxides
Physical Sciences → Materials Science → Materials Chemistry
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