Characterization of rf-sputtered indium tin oxide thin films

Muhammad Tariq Bhatti; Anwar Manzoor Rana; Abdul Faheem Khan

doi:10.1016/j.matchemphys.2003.11.022

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Characterization of rf-sputtered indium tin oxide thin films

Muhammad Tariq Bhatti Anwar Manzoor Rana Abdul Faheem Khan

Year: 2004 Journal: Materials Chemistry and Physics Vol: 84 (1)Pages: 126-130 Publisher: Elsevier BV

DOI: 10.1016/j.matchemphys.2003.11.022

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Keywords:

Electrical resistivity and conductivity Materials science Thin film Indium tin oxide Annealing (glass) Indium Band gap Tin Sputtering Optoelectronics Analytical Chemistry (journal) Metallurgy Nanotechnology Chemistry

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Characterization of rf-sputtered indium tin oxide thin films

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