JOURNAL ARTICLE
Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system
Yansheng GongRong TuTakashi Goto
Year: 2009 Journal: Surface and Coatings Technology Vol: 204 (14)Pages: 2111-2117 Publisher: Elsevier BV
Keywords:
Materials science Titanium Titanium nitride Chemical vapor deposition Analytical Chemistry (journal) Thin film Substrate (aquarium) Excimer laser Stoichiometry Laser Nitride Layer (electronics) Metallurgy Composite material Nanotechnology Optics
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4
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FWCI (Field Weighted Citation Impact)
39
Refs
0.09
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Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
GaN-based semiconductor devices and materials
Physical Sciences → Physics and Astronomy → Condensed Matter Physics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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