JOURNAL ARTICLE
Inhomogeneity in the fabrication of InGaAs/GaAs quantum wire arrays by selective-area metalorganic chemical vapor deposition
Roberto R. PanepucciM.L. OsowskiDouglas TurnbullSimin GuS. G. BishopJ. J. ColemanI. Adesida
Year: 1996 Journal: Superlattices and Microstructures Vol: 20 (1)Pages: 111-116 Publisher: Elsevier BV
Keywords:
Metalorganic vapour phase epitaxy Chemical vapor deposition Materials science Fabrication Quantum wire Electron-beam lithography Optoelectronics Etching (microfabrication) Photoluminescence Isotropic etching Lithography Deposition (geology) Electron beam physical vapor deposition Gallium arsenide Quantum Nanotechnology Epitaxy Resist Physics
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3
Cited By
0.23
FWCI (Field Weighted Citation Impact)
0
Refs
0.48
Citation Normalized Percentile
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Topics
Semiconductor Quantum Structures and Devices
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Quantum Dots Synthesis And Properties
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor Lasers and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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