Hydrogen-sensitive palladium gate MOS capacitors

Abstract

The C-V characteristics of palladium gate MOS capacitors change significantly when exposed to an air ambient containing up to 4% hydrogen. From these experiments, it is concluded that these changes are due to the lowering of the palladium work function (by as much as 1 V) brought on by the formation of palladium hydride. Mobile charges in the oxide do not contribute to the observed C-V shifts brought about by exposure to hydrogen.