Preparation of Al-doped ZnO thin film deposited at room temperature

You Seung Rim; Sang Mo Kim; Hyung Wook Choi; Sang Joon Park; Kyung Hwan Kim

doi:10.1016/j.colsurfa.2007.04.138

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Preparation of Al-doped ZnO thin film deposited at room temperature

You Seung Rim Sang Mo Kim Hyung Wook Choi Sang Joon Park Kyung Hwan Kim

Year: 2007 Journal: Colloids and Surfaces A Physicochemical and Engineering Aspects Vol: 313-314 Pages: 461-464 Publisher: Elsevier BV

DOI: 10.1016/j.colsurfa.2007.04.138

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Keywords:

Thin film Materials science Transmittance Substrate (aquarium) Volumetric flow rate Electrical resistivity and conductivity Doping Sputtering Analytical Chemistry (journal) Chemical engineering Composite material Optoelectronics Nanotechnology Chemistry Chromatography

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper-based nanomaterials and applications

Physical Sciences → Materials Science → Materials Chemistry

Preparation of Al-doped ZnO thin film deposited at room temperature

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