Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN

Farzan Alavian Ghavanini; Maria Lopez-Damian; Damon Rafieian; Krister Svensson; Per Lundgren; Peter Enoksson

doi:10.1016/j.sna.2011.04.036

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Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN

Farzan Alavian Ghavanini Maria Lopez-Damian Damon Rafieian Krister Svensson Per Lundgren Peter Enoksson

Year: 2011 Journal: Sensors and Actuators A Physical Vol: 172 (1)Pages: 347-358 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2011.04.036

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Keywords:

Tin Plasma-enhanced chemical vapor deposition Materials science Phase (matter) Carbon nanofiber Nanofiber Composite material Nanotechnology Chemical vapor deposition Chemistry Metallurgy Carbon nanotube

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Graphene research and applications

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Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN

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