Vertically Aligned Carbon Nanotubes Production by PECVD

Abstract

This chapter presents the results of experimental studies of the PECVD technological mode parameters' influence on the formation of catalytic centers and carbon nanotubes' (CNTs') growth processes. This chapter also presents the ability to regulate the growth parameter for the controlled production of CNTs with the required geometric parameters, properties, and growth mechanisms. The results of experimental studies of the heating temperature and activation time effects on the catalytic center formation will be presented. This chapter also shows the effects of growth temperature, heating rate, and the activation time on the geometric and structural parameters of the carbon nanotubes. Experimental studies were carried out with the use of AFM, SEM, TEM, and EXAFS techniques. The results can be used in the development of technological processes for creating ultrafast energy-efficient electronic component base with carbon nanostructures, particularly nanoelectromechanical switches, flexo- and piezoelectric generators, gas sensors, and high-performance emitters.