JOURNAL ARTICLE

Enhanced dill exposure model for thick photoresist lithography

Keywords:
Photoresist Resist Lithography Materials science Microelectromechanical systems Photolithography Optoelectronics Optics Nanotechnology Layer (electronics) Physics

Metrics

18
Cited By
1.93
FWCI (Field Weighted Citation Impact)
8
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Measurement and Metrology Techniques
Physical Sciences →  Engineering →  Mechanical Engineering
Welding Techniques and Residual Stresses
Physical Sciences →  Engineering →  Mechanical Engineering

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