JOURNAL ARTICLE
Oxide growth on copper thin films
L. PaolettiP. A. RosaP. PicozziS. Santucci
Year: 1983 Journal: Ultramicroscopy Vol: 12 (1-2)Pages: 116-116 Publisher: Elsevier BV
Keywords:
Copper Thin film Materials science Oxide Copper oxide Chemical engineering Metallurgy Chemistry Nanotechnology Engineering
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Fluid Dynamics and Thin Films
Physical Sciences → Engineering → Computational Mechanics
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