Structural properties of RF-magnetron sputtered Cu2O thin films

Cristy Leonor Azanza Ricardo; Mirco D’Incau; Matteo Leoni; Claudia Malerba; A. Mittiga; Paolo Scardi

doi:10.1016/j.tsf.2011.07.066

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Structural properties of RF-magnetron sputtered Cu2O thin films

Cristy Leonor Azanza Ricardo Mirco D’Incau Matteo Leoni Claudia Malerba A. Mittiga Paolo Scardi

Year: 2011 Journal: Thin Solid Films Vol: 520 (1)Pages: 280-286 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2011.07.066

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Keywords:

Microstructure Materials science Residual stress Thin film Sputtering Sputter deposition Composite material Tungsten Deposition (geology) Soda-lime glass Cavity magnetron Oxide Mineralogy Metallurgy Analytical Chemistry (journal) Chemistry Nanotechnology

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Copper-based nanomaterials and applications

Physical Sciences → Materials Science → Materials Chemistry

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Structural properties of RF-magnetron sputtered Cu2O thin films

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