Ohmic contacts to n-type and p-type ZnSe

M.R. Park; Wayne A. Anderson; Minhyon Jeon; Hong‐Gang Luo

doi:10.1016/s0038-1101(98)00191-9

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Ohmic contacts to n-type and p-type ZnSe

M.R. Park Wayne A. Anderson Minhyon Jeon Hong‐Gang Luo

Year: 1999 Journal: Solid-State Electronics Vol: 43 (1)Pages: 113-121 Publisher: Elsevier BV

DOI: 10.1016/s0038-1101(98)00191-9

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Keywords:

Ohmic contact Contact resistance Materials science Annealing (glass) Molecular beam epitaxy Reactive-ion etching Analytical Chemistry (journal) Doping Optoelectronics Etching (microfabrication) Chemistry Epitaxy Nanotechnology Metallurgy

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Semiconductor Quantum Structures and Devices

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Ohmic contacts to n-type and p-type ZnSe

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