Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

Abstract

Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7 eV and the microhardness of 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is observed. The film microhardness is improved with the increase of ion kinetic energy of plasma plume from 300 to 600 eV. The characteristics of DLC film deposition with fs pulses is discussed.