JOURNAL ARTICLE
Single mask fabrication process for movable MEMS devices
Ali B. Alamin DowAdel B. GougamNazir P. KheraniIvo W. Rangelow
Year: 2014 Journal: Microsystem Technologies Vol: 20 (4-5)Pages: 955-961 Publisher: Springer Science+Business Media
Keywords:
Fabrication Materials science Surface micromachining Wafer Microelectromechanical systems Silicon on insulator Etching (microfabrication) Stiction Reactive-ion etching Dry etching Bulk micromachining Silicon Optoelectronics Substrate (aquarium) Nanotechnology Process (computing) Deep reactive-ion etching Computer science
Metrics
1
Cited By
0.18
FWCI (Field Weighted Citation Impact)
15
Refs
0.57
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanowire Synthesis and Applications
Physical Sciences → Engineering → Biomedical Engineering
Plasma Diagnostics and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
Zhenchuan YangYumin WeiXu MaoGuizhen Yan
Journal: Science China Technological Sciences Year: 2012 Vol: 56 (2)Pages: 387-391
DISSERTATION
Movable MEMS Devices on Flexible Silicon
University: King Abdullah University of Science and Technology Repository (King Abdullah University of Science and Technology) Year: 2013
JOURNAL ARTICLE
Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask Process
George ThachilDeleep R. NairAmitava DasGupta
Journal: Journal of Microelectromechanical Systems Year: 2020 Vol: 29 (5)Pages: 1225-1233
JOURNAL ARTICLE
Movable-mask reactive ion etch process for thickness control in devices
R. L. SandstromB. PezeshkiF. AgahiRichard MartelJ. G. Crockett
Journal: Applied Physics Letters Year: 1996 Vol: 69 (15)Pages: 2163-2165