Bare-board e-beam testing: The charge storage problem

Matthias Brünner; N. Kolbenschlag; G. Westerman; B. Lischke

doi:10.1016/0167-9317(88)90005-6

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Bare-board e-beam testing: The charge storage problem

Matthias Brünner N. Kolbenschlag G. Westerman B. Lischke

Year: 1988 Journal: Microelectronic Engineering Vol: 8 (1-2)Pages: 25-35 Publisher: Elsevier BV

DOI: 10.1016/0167-9317(88)90005-6

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Keywords:

Leakage (economics) Miniaturization Printed circuit board Bistability Electronic circuit Materials science Beam (structure) Cathode Electrical engineering Cathode ray Optoelectronics Computer science Nanotechnology Electron Optics Engineering Physics

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Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electron and X-Ray Spectroscopy Techniques

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Bare-board e-beam testing: The charge storage problem

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