Measurements of thin oxide films of SiO2/Si(100)

W. N. Lennard; G.R. Massoumi; I. V. Mitchell; Hong Tang; D. F. Mitchell; J. A. Bardwell

doi:10.1016/0168-583x(94)95782-7

ScienceGate Book Chapters

JOURNAL ARTICLE

Measurements of thin oxide films of SiO2/Si(100)

W. N. Lennard G.R. Massoumi I. V. Mitchell Hong Tang D. F. Mitchell J. A. Bardwell

Year: 1994 Journal: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 85 (1-4)Pages: 42-46 Publisher: Elsevier BV

DOI: 10.1016/0168-583x(94)95782-7

Get Full-Text PDF Get Analytical Report

Keywords:

Yield (engineering) Substrate (aquarium) Silicon Materials science Deuterium X-ray photoelectron spectroscopy Thin film Oxide Nuclear reaction Analytical Chemistry (journal) Proton Silicon dioxide Oxygen Silicon oxide Nuclear reaction analysis Hydrogen Chemistry Optoelectronics Nanotechnology Atomic physics Nuclear magnetic resonance Nuclear physics Physics

Metrics

Cited By

1.48

FWCI (Field Weighted Citation Impact)

Refs

0.76

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Electron and X-Ray Spectroscopy Techniques

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Nuclear Physics and Applications

Physical Sciences → Physics and Astronomy → Radiation

X-ray Spectroscopy and Fluorescence Analysis

Physical Sciences → Physics and Astronomy → Radiation

Measurements of thin oxide films of SiO2/Si(100)

Metrics

Topics

Related Documents

Optical Properties of Bismuth Telluride Thin Films, Bi2Te3/Si(100) and Bi2Te3/SiO2/Si(100)

Photoemission study of the SiO2/Si interface structure of thin oxide films on Si(100), (111), and (110) surfaces

Photoacoustic spectroscopy of thin SiO2 films grown on (100) crystalline Si substrates

Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates

Density Profile of Thermal Oxide Thin Films on Si(100)