JOURNAL ARTICLE

Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating

Keywords:
Materials science Substrate (aquarium) Sputter deposition Nitride Thin film Sputtering Optoelectronics Cavity magnetron Band gap Spectroscopy Transmission electron microscopy Analytical Chemistry (journal) Optics Nanotechnology Layer (electronics) Chemistry

Metrics

22
Cited By
0.22
FWCI (Field Weighted Citation Impact)
22
Refs
0.55
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
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