Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers

Toshiyuki Noji; Kazuo Nakamura; Hideyuki Horisawa; Nobuo Yasunaga

doi:10.1007/1-84628-559-3_73

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Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers

Toshiyuki Noji Kazuo Nakamura Hideyuki Horisawa Nobuo Yasunaga

Year: 2006 Pages: 353-354

DOI: 10.1007/1-84628-559-3_73

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Keywords:

Laser Sapphire Materials science Fluence Surface roughness Wavelength Optics Optoelectronics Surface micromachining Machining Ti:sapphire laser Thermal X-ray laser Surface finish Composite material Laser power scaling Fabrication Metallurgy

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers

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