JOURNAL ARTICLE

2D Photonic Crystal Structures Fabricated by Nanosphere Lithography

Abstract

Two-dimensional photonic crystal (PC) structures have been successfully fabricated by a substrate-independent nanosphere lithography method. The air-filling factors of the PC patterns can be accurately controlled by thinning the polymer nanospheres using O 2 plasma.

Keywords:
Nanosphere lithography Photonic crystal Lithography Materials science Substrate (aquarium) Photonics Nanotechnology Optoelectronics Crystal (programming language) Computer science Fabrication

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Topics

Photonic Crystals and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Plasmonic and Surface Plasmon Research
Physical Sciences →  Engineering →  Biomedical Engineering

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