Laser Beam Lithography For 3-D Surface Patterning

C. Arnone; Giuseppe Costantino Giaconia; C. Nick Pace; Salvatore Ferruggia Bonura; Michael Greco

doi:10.1007/978-94-011-1990-0_20

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Laser Beam Lithography For 3-D Surface Patterning

C. Arnone Giuseppe Costantino Giaconia C. Nick Pace Salvatore Ferruggia Bonura Michael Greco

Year: 1993 Pages: 315-320

DOI: 10.1007/978-94-011-1990-0_20

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Keywords:

Materials science Laser Lithography Optics Maskless lithography Resist Planar Optoelectronics Fabrication Electron-beam lithography Nanotechnology Layer (electronics) Computer science Computer graphics (images) Physics

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Advanced optical system design

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Laser Beam Lithography For 3-D Surface Patterning

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