JOURNAL ARTICLE

An optimised silicon piezoresistive microcantilever sensor for surface stress studies

Mohd. Zahid AnsariChongdu Cho

Year: 2015 Journal:   Microsystem Technologies Vol: 22 (9)Pages: 2279-2285   Publisher: Springer Science+Business Media
Keywords:
Piezoresistive effect Cantilever Surface stress Materials science Deflection (physics) Finite element method Silicon Stress (linguistics) Sensitivity (control systems) Microelectromechanical systems Dopant Optoelectronics Composite material Nanotechnology Structural engineering Electronic engineering Doping Optics Engineering Physics

Metrics

8
Cited By
0.36
FWCI (Field Weighted Citation Impact)
27
Refs
0.66
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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