An optimised silicon piezoresistive microcantilever sensor for surface stress studies

Mohd. Zahid Ansari; Chongdu Cho

doi:10.1007/s00542-015-2615-3

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An optimised silicon piezoresistive microcantilever sensor for surface stress studies

Mohd. Zahid Ansari Chongdu Cho

Year: 2015 Journal: Microsystem Technologies Vol: 22 (9)Pages: 2279-2285 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-015-2615-3

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Keywords:

Piezoresistive effect Cantilever Surface stress Materials science Deflection (physics) Finite element method Silicon Stress (linguistics) Sensitivity (control systems) Microelectromechanical systems Dopant Optoelectronics Composite material Nanotechnology Structural engineering Electronic engineering Doping Optics Engineering Physics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

An optimised silicon piezoresistive microcantilever sensor for surface stress studies

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