BOOK-CHAPTER

Design and Simulation of a Novel Electrostatic Tunable MEMS Inductor for RF Apllications

Keywords:
Inductor Microelectromechanical systems Materials science Electronic engineering Electrical engineering Engineering Computer science Optoelectronics Voltage

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.07
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Microwave Engineering and Waveguides
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering

Related Documents

JOURNAL ARTICLE

Design and Simulation of RF MEMS Tunable Spiral Inductor

Sholeh GholamianEbrahim Abbaspour-Sani

Journal:   Advanced materials research Year: 2011 Vol: 403-408 Pages: 4148-4151
JOURNAL ARTICLE

A tunable RF MEMS inductor

I. Zine-El-AbidineM. OkoniewskiJ.G. McRory

Journal:   Proceedings. 2004 International Conference on MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Year: 2004 Pages: 568-570
© 2026 ScienceGate Book Chapters — All rights reserved.