Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Evgeni Gusev; Eric Garfunkel; Arthur Dideikin

doi:10.1007/978-90-481-3807-4

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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Evgeni Gusev Eric Garfunkel Arthur Dideikin

Year: 2010 NATO science for peace and security series. B, Physics and biophysics Publisher: Springer Nature (Netherlands)

DOI: 10.1007/978-90-481-3807-4

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Keywords:

Nanoelectromechanical systems Field (mathematics) Nanotechnology Engineering Engineering ethics Microelectromechanical systems Engineering physics Systems engineering Mechanical engineering Materials science

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0.99

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0.89

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Citation History

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Metrics

Citation History

Topics

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